Slurry Motor (Pump) Electric current/Flow rate Monitoring System
It is a monitoring system to prevent loss of production wafers due to failure of slurry discharge. This system enables visualization and quantification of electric current values of Slurry Motor (Pump)and slurry flow rate from the motor on CMP equipment and generate alarms when abnormal movements are detected.
- Visualization of both electric current of motors and slurry flow rate data is possible
- Data can be displayed on the PC Monitors, tablets or smartphones
- Possible to generate alarms when abnormal movements are detected
- Interlocking function is available as an option (*Need to discuss separately and based on equipment specification)
- Method of data display and communication can be customized. (External clouds/Wi-Fi/Bluetooth, etc.)