Robot Arms (Blades) Position Monitoring System

A monitoring system to prevent loss of production wafers due to fall/breakage of wafers caused by misalignment of arms. This system enable visualization and quantification of values of position of arms (blades) for semiconductor wafer transfer robot and generate alarms when abnormal movements are detected.


  • It is possible to visualize distance in between arm and stage and also between stage and bottom.
  • Data can be displayed on the PC Monitors, tablets or smartphones
  • Possible to generate alarms while abnormal movements are detected
  • Interlocking function is available as an option (*Need to discuss separately and based on equipment specification)
  • Method of data display and communication can be customized. (External clouds/Wi-Fi/Bluetooth, etc.)
Robot Arms (Blades) Position Monitoring System