Residual Gas Monitoring System

A system that enables real time visualization and quantification of values of the amount of gases remaining during semiconductor manufacturing processes such as etching, sputtering, CVD, etc.
Thereby it allows gas cylinder management.


  • Possible to visualize amount of gases in website in real time
  • Easy to manage gas replacement time
  • Weight management of cylinders is no longer required, and it is possible to manage the remaining amount of gas regardless of type
  • Data can be displayed on the PC Monitors, tablets or smartphones
  • A gas leak detection function can be added as an option.
  • Methods of display and communication can be customized. (External clouds/WiFi/Bluetooth, etc.)

Current status/Problems