Eulitha shall exhibit at " 4th XR Fair Tokyo (Summer)"

June 4, 2024

Eulitha shall exhibit at " The 4th XR Fair Tokyo (Summer)" which will be held in-person format from July 3rd (Wed) to 5th (Fri) 2024.

Eulitha is providing high-quality lithography solutions for photonics manufacturing. 

Details are as follows.

Details

Date July 3~5, 2024 (JST)
Venue Tokyo Big Sight, West hall
 Booth No.  Hall 1, Booth No.: 14-31
 Visitor registration is here 

Exhibition contents

Eulitha PHABLE Lithography system

A Better Way for Manufacturing Diffractive Optics on AR/VR Waveguides with excellent cost performance.

Eulitha's breakthrough PHABLE technology brings the proven advantages of photolithography to the AR/VR field enabling highest quality waveguide production at low cost.

Phable series commonly support;

  • UV type has 125nm half pitch resolution
  • DUV type has 65nm half pitch resolution
PhableR
  • For R&D and small volume production
  • Manual loading, automatic exposure
  • Standard model supports ~Φ6” wafer size
    (Larger size on request)
PhableX
  • For volume production
  • Cassette to cassette, automatic exposure
  • Standard model supports ~Φ8” wafer size
    (Larger size on request)
PhableS
  • For volume production
  • Cassette to cassette, automatic exposure
  • Standard model supports ~Φ12” wafer size
    (Larger size on request)

Please visit the booth.