Eulitha shall exhibit at " 4th XR Fair Tokyo (Summer)"
June 4, 2024
Eulitha shall exhibit at " The 4th XR Fair Tokyo (Summer)" which will be held in-person format from July 3rd (Wed) to 5th (Fri) 2024.
Eulitha is providing high-quality lithography solutions for photonics manufacturing.
Details are as follows.
Details
Date | July 3~5, 2024 (JST) |
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Venue | Tokyo Big Sight, West hall |
Booth No. | Hall 1, Booth No.: 14-31 |
Visitor registration is here |
Exhibition contents
Eulitha PHABLE Lithography system
A Better Way for Manufacturing Diffractive Optics on AR/VR Waveguides with excellent cost performance.
Eulitha's breakthrough PHABLE technology brings the proven advantages of photolithography to the AR/VR field enabling highest quality waveguide production at low cost.
Phable series commonly support;
- UV type has 125nm half pitch resolution
- DUV type has 65nm half pitch resolution
PhableR
- For R&D and small volume production
- Manual loading, automatic exposure
- Standard model supports ~Φ6” wafer size
(Larger size on request)

PhableX
- For volume production
- Cassette to cassette, automatic exposure
- Standard model supports ~Φ8” wafer size
(Larger size on request)

PhableS
- For volume production
- Cassette to cassette, automatic exposure
- Standard model supports ~Φ12” wafer size
(Larger size on request)

Please visit the booth.