Eulitha shall exhibit at " 3rd XR Fair Tokyo (Summer)"
June 14, 2023
Eulitha shall exhibit at " The 3rd XR Fair Tokyo (Summer)" which will be held in-person format from June 28th (Wed) to 30th (Fri), 2023.
Eulitha is providing high-quality lithography solutions for photonics manufacturing.
Details are as follows.
Details
| Date | June 28-30, 2023 (JST) |
|---|---|
| Venue | Tokyo Big Sight, East hall |
| Booth No. | Hall 8, Booth No.: 32-11 |
| Visitor registration is here | |
Exhibition contents
Eulitha PHABLE Lithography system
A Better Way for Manufacturing Diffractive Optics on AR/VR Waveguides.
Eulitha's breakthrough PHABLE technology brings the proven advantages of photolithography to the AR/VR field enabling highest quality waveguide production at low cost.
Phable series commonly support;
UV type has 125nm half pitch resolution
DUV type has65nm half pitch resolution
PhableR
- For R&D and small volume production
- Manual loading, automatic exposure
- Standard model supports ~Φ6” wafer size
(Larger size on request)
PhableX
- For volume production
- Cassette to cassette, automatic exposure
- Standard model supports ~Φ8” wafer size
(Larger size on request)
PhableS
- For volume production
- Cassette to cassette, automatic exposure
- Standard model supports ~Φ12” wafer size
(Larger size on request)
Please visit the booth.