We shall exhibit at "MEMS Sensing & Network System Exhibition 2023"

Dec. 26, 2023

We will exhibit at "MEMS Sensing & Network System Exhibition 2023" to be held from 1/Feb/2023. 

Details are as follows.

Details

Date & Time Feb.1st(Wed) to 3rd(Fri) of 2023, 10:00~17:00
Venue Tokyo Big Sight, East 1 Hall
Booth NO. 1D-17
Visitor Registration  https://nanotech2023.jcdbizmatch.jp/en/Registration

Contents

MEMS prototyping / Manufacturing total solution

Utilizing our in-house processing facility and global networks, we provide optimal solutions designing, prototyping, and volume production of MEMS devices in accordance with your budget and schedule.

[ Process examples ]

  • Thin film coating (Sputtering, Evaporation, CVD, Plating, ALD, etc.)
  • Photolithography (Aligner, Stepper, EB, etc.)
  • Etching (Wet, Dry, High aspect ratio deep etching (ICP), Ion milling, etc.)
  • CMP (Flattening of various thin films, Flattening before direct bonding, etc.)
  • Wafer bonding (RT bonding, Plasma bonding, Anode bonding, Eutectic bonding, etc.)
  • Ion implantation
  • Thermal processing/Annealing (Laser anneal, RTA, Thermal diffusion furnace, etc.)
  • Dicing/wafer thinning process (Dicer, stealth dicing, BG process, etc.)
  • Nano imprinting (Mold fabrication, Resin transfer process, Anti-sticking treatment, various consulting) 

[ Introduction to MEMS foundry – Silex Microsystems ]

  • Unique TSV technology [Sil-Via®], [Met-Via®]
  • Unique TGV technology for thinning MEMS devices
  • Volume production of PZT film
  • Smart Block™

[ Polymer MEMS development ]

  • Nano-micro structure formation technology on polymers, and equipment sales.
  • Fine patterning on non-flat substrates such as films and sheets
  • Supporting 8inch or smaller
  • UV nano-imprint system “TEX series”

Nano Imprint Total Solution

Providing comprehensive services from mold fabrication to imprinting

  • Fine mold
  • Various trial molds (Si, Ni, Quarts) 
  • Mold replication, cleaning service
  • Consulting

If you intend to visit the event, do not hesitate to stop by our booth.