Thin film

Thin film deposition services

Our thin film fabrication service main features

• With more than 120 types of targets available in stock we are able to offer our customers deposition services with various materials.
  (Al, Ti, Cr, Mo, W, Ta, Si, DLC, Au, Ir, Ru, Pd, Pt, AlSi, AlSiCu, AlCu, NiFe, SiO₂, ITO, IZO, AZO, ZnO, PZT, Si₃N₄, TiN, SiC　etc.)
• Kyodo International has 7 sputtering systems available in house. We can offer you the best solution according to your required substrate size, material type and quantity.
• We are able to process substrate sizes from φ2" to φ12" along with other shapes. We can handle various materials such as Si, glass, metals, films, organic materials, resin (PMMA, COP, PC, PET etc.).
• We undertake process requests from a single substrate to hundreds of pieces (volume production).
• We offer thin film deposition services by evaporation, CVD and PLD (TEOS, SiO₂, SiN, Poly-Si, a-Si, PZT, etc.).

Thin film technologies classified according to application

• Semiconductor (Aluminum alloy, Passivation layer etc.)
• MEMS, Sensors (using piezoelectric materials such as PZT, LNO, etc.)
• Backside electrodes for Power devices (Al, Ti, Ni, Au, Ag)
• Thin film solar cells (a-Si, ITO etc.)
• Thin film lithium secondary batteries (LiPON, Li etc.)
• Easy demold coatings for molds (Pt etc.)
• Titanium coatings for medical devices (Ti)

Technical info

• SiO₂ insulation layers by PVD which have equivalent properties as layers deposited by thermal oxidation or CVD
• ITO films with sheet resistance of 30Ω/sq obtained by deposition at room temperature
• Sheet resistivity and Transparency of ITO sputtered film
• Backside electrodes for power devices without chipping occurerd when dicing
• High quality piezoelectric film (PZT etc.)
• Roll to Roll Sputtering Service (Al, Cu, etc.)

Specifications

• Sputtering devices specifications
• Sputteirng target stock list
• Thin film inspection / analysis services
• CVD Performance List