Thin film membrane fabrication technology for various materials

Technology that can fabricate thin film membranes even with materials conventionally difficult to form membranes.

We pursued polymer-based membrane fabrication technology and made it possible to increase the kinds of selectable thin films drastically. We support development and prototyping with new substrates and membrane materials.

Features

  • The base material forming the membrane is a polymer (COP, polyimide, supplied polymers are also available)
  • Membrane materials are selectable from materials that can be sputtered (Sputtering Target Stock List)
  • Base size · Membrane pattern is freely designable

Membrane processing example

Membrane formation inside the honeycomb structure for COP film (membrane with bottom part Au)

Membrane formation inside the honeycomb structure for COP film (membrane with bottom part Au)

Three-dimensional Al membrane (Al membrane freestanding structure with all 1 μm thickness)

Three-dimensional Al membrane (Al membrane freestanding structure with all 1 μm thickness)

Thermocouple membrane

Thermocouple membrane (K type thin film thermocouple): It is possible to increase the response speed by forming membrane at the tip of measuring part of temperature while decreasing the heat capacity.

Thermocouple membrane

Nanopore additional processing of thin film membrane

Nanopore additional processing of thin film membrane

For customers like this

  • In material development, in case various types of membranes are required (single layer / laminate layer both available)
  • In the development of functional films, in case enhancement of application usage and value of the film are required
  • Want to use it for the sensor part of polymer MEMS
  • Want to mount samples on ultra-thin membranes for bio-related evaluation

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製品分類1 Deposition, Photolithography, Etching| Nanoimprinting
製品分類2 Thin film thermocouple
プロセス分類
サムネイル画像 Thin film second generation lithium ion batteries deposition and processing
説明文
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