Roll to Roll thin film sputtering services
In line with needs of miniaturization, weight saving and thinning of electronics appliances, development of film devices such as photovoltaic, electric paper, OELD, lithium ion battery etc. becomes popular than ever.
Features
- Control deposition rate and carrier rate according to material of thin film/substrates. We offer thin film processed by optimum conditions.
- Possible to undertake processes in few meters.
Applicable thin film material
- Ag
- Al
- C
- Cr
- Cu
- Mo
- W
Please ask for other materials
Applicable substrates
- PMMA
- PET
- PC
- PEN
- COC
- etc.
Applications
- Photovoltaic(Thin film Si, Organic thin film, dye-sensitised
- Electric paper
- Organic devices (OLED, Organic thin film transistor)
- Lithium ion battery
- Thin film condenser
- Film, Plastic substrates
etc.
Specification of equipment
| Sputtering method | Roll to roll |
|---|---|
| Reverse sputtering | N/A |
| Substrate holder | Roller length 140mm |
| Reactive sputter | ASK (O2mass flow is available) |
| Power supply | DC |
| Distribution of thin film thickness | ±5% |
| Exhaust system | Turbo molecular pump Rotary pump Ultimate pressure : 1 x 10 - 4 Pa（w/o substrate） Leak volume : 10 - 3 Pa・L/s（w/o substrate Vacuometer : Pirani gauge, BA gauge Potentiometer : Quadrupole mass spectrometer Gas introduction : mass flow controller |
| Sputtering source | Magnetron sputtering source x 1 |
| Substrate heating | N/A |
| Substrate transfer | Roll to roll (with tension control) |
| Processing capacity | Roller width : max. 140mm Roll length : Several Tens meters |
| T-S distance | 50mm (changeable to 100mm) |
| Working environmen | Clean booth |
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| 製品分類1 | Deposition, Photolithography, Etching|Roll to Roll |
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| 製品分類2 | Roll to Roll sputtering |
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