High quality PZT deposition for piezoelectric devices
PZT in piezoelectric films has become an indispensable part of daily life and found widespread use in such applications and devices as: pressure sensors, timing devices, inkjet printers, piezoelectric speakers, ultrasonic probe device, energy harvesting and energy harvesting.
We provide services offering high quality PZT with regard to the needs of these various applications:
- Deposition services of high quality PZT using dedicated equipment
- Patterning and etching services also provided
- Available from small quantities
Process | Sputtering, Sol-Gel |
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Materials | PZT, AlN, ZnO, LiNbO3 etc. |
Wafer size | ≦ 6 inch |
Properties | d31:150pm/V、stress: ±100MPa |
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製品分類1 | Deposition, Photolithography, Etching |
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製品分類2 | PZT |
プロセス分類 |
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