CVD performance list

Device SPEC	Working Atmosphere	Principal Process	Handling Substrate Size
Normal Pressure CVD	Clean room, Substrate can be washed	SiO2, PSG, etc.	Φ4", Φ5"
LP-CVD	Clean room, Substrate can be washed	poly-Si, etc.	Φ2", Φ3", Φ4", Φ6"
PE-CVD	Clean room, Substrate can be washed	SiO2、SiN	Φ2", Φ3," Φ4", Φ6", Φ8"
	Clean room, Substrate can be washed	TEOS	Φ4", Φ5", Φ6"