Vacuum Pump (Cryo/Turbo/Dry/Rotary) repair
Power supply (DC/RF), Vacuum pump Repair (overhaul)
We offer economical repair service for power supply (DC/RF etc.), matcher (matching box), chiller, pump (rotary/cryo/turbo/dry).
Also a load of secondhand system sales are available. Ask for details.
Power supply
Macher
Chiller
Rotary pump
Turbo pump
Dry pump
Cryopump overhaul
We meet requirement of quality retention, raise operation rate, total cost down based on abundant expertise.
Model
- Helix : 8CT-8, 10, 100, 250F / onboard 8, 10
- ULVAC : U series
- Anellva : CUP series
*Ask for other models and makers.
Feature
- Quality retention of standard exchange parts.
- Quality-conscious stress test (up to 10K)
- Strict second array and dispressor drying
Inspection machines
Compressor
*Multi drive is also available
Ionizer
*6.7E-10Pa・m3/sec or less
Chiller
Work descriptions
検索用入力欄
記入時注意事項
- テーブルの行列は変更しないでください。
- 分類が複数ある場合は、| ←半角の縦棒で区切って連続で入力してください。
また、区切り文字の前後に空白は入れないでください。
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| 製品分類1 | Consumables parts for sale/repair/overhauls/field services |
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| 製品分類2 | Other repair/refurbishment |
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