[Sputtering / CVD / Etching / Photolithography] Vacuum Pump (Cryo/Turbo/Dry/Rotary) repair Cryo Compressor repair Electro Static Chuck (E-Chuck/ESC) & Heater refurbishment Vacuum Valve (Gate Valve) repair Motor Driver : Stepping & Motor repair Anodized Aluminum parts/other refurbishment Ceramic/Quartz parts/other refurbishment Chuck Cleaning Wafer (CCW) Main Controller Box repair & upgrade Electronics/MEMS Thin film deposition, Photolithography, Etching Services MEMS Total Solutions Roll-to-roll (R2R) process contract manufacturing business Microfluidics chip (µTAS) Nanoimprint Total Solution Precision Cleaning Services SUPERBLAST Consumables parts for sale/ refurbishment/ repair/ overhaul/ field services [CMP] Original parts [CMP] Repair / Maintenance / Overhaul [CMP] Facility modification / Additional function for failure prevention [Ion Implanter] Repair / Refurbishment / Overhaul [Sputtering / CVD / Etching / Photolithography] Vacuum Pump (Cryo/Turbo/Dry/Rotary) repair Cryo compressor repair/overhaul Electrostatic chuck (ESC) & heater refurbishment Vacuum Valve (Gate Valve) repair Stepping motor driver repair Anodized Aluminum parts refurbishment Ceramic/Quartz parts refurbishment Chuck Cleaning Wafer (CCW) Main Controller Box repair＆upgrade On-site engineering for academics & R&D Microfabrication Equipment (Systems) Sputtering targets and Bonding process
