[Ion Implanter] Repair / Refurbishment / Overhaul Motor : Direct Drive (DD) repair Probe/Particle Monitor : HYT repair/cleaning Power Supply : HV/High Voltage repair Electro Static Chuck (E-Chuck/ESC) refurbishment Vacuum Pump (Cryo/Turbo/Dry/Rotary) repair Electronics/MEMS Thin film deposition, Photolithography, Etching Services MEMS Total Solutions Roll-to-roll (R2R) process contract manufacturing business Microfluidics chip (µTAS) Nanoimprint Total Solution Precision Cleaning Services SUPERBLAST Consumables parts for sale/ refurbishment/ repair/ overhaul/ field services [CMP] Original parts [CMP] Repair / Maintenance / Overhaul [CMP] Facility modification / Additional function for failure prevention [Ion Implanter] Repair / Refurbishment / Overhaul Motor : Direct Drive (DD) repair HYT Probe Repair / Cleaning Power supply (DC/RF) Repair (overhaul) Electrostatic Chuck (E-Chuck / ESC) Vacuum Pump (Cryo/Turbo/Dry/Rotary) repair [Sputtering / CVD / Etching / Photolithography] On-site engineering for academics & R&D Microfabrication Equipment (Systems) Sputtering targets and Bonding process
