[CMP] Original parts for cost reduction / Operability improvement Retaining Ring Cross Cover Carrier Head parts Flexure Pad Conditioner Head Gear Box : Pad Conditioner Slip Ring : ISRM End Point Motor : Wet Robot QC Dry / Wet side assembly Modified Bearing for QC Dry / Wet side QC Gear Box assembly Electronics/MEMS Thin film deposition, Photolithography, Etching Services MEMS Total Solutions Roll-to-roll (R2R) process contract manufacturing business Microfluidics chip (µTAS) Nanoimprint Total Solution Precision Cleaning Services SUPERBLAST Consumables parts for sale/ refurbishment/ repair/ overhaul/ field services [CMP] Original parts Retaining Ring Cross Cover (hydrophobicity improvement model) Carrier Head Parts Flexure Pad Conditioner Head (Improved model for leakage error problem) Gear Box Pad Conditioner (Reasonable model) Slip Ring ISRM End-point (Up-grade model) Motor Wet Robot (longevity improvement model), Z, X, Wrist && Shoulder QC Dry / Wet side assembly Modified Bearing for QC Dry / Wet side QC Gear Box assembly [CMP] Repair / Maintenance / Overhaul [CMP] Facility modification / Additional function for failure prevention [Ion Implanter] Repair / Refurbishment / Overhaul [Sputtering / CVD / Etching / Photolithography] On-site engineering for academics & R&D Microfabrication Equipment (Systems) Sputtering targets and Bonding process
