Modified Bearing for QC Dry / Wet side

Modified Bearing for QC Dry / Wet side Assembly for Brush Tank (durability・corrosion resistance improvement type)

We offer "Si3N4 bearing" for QC Dry, Wet side with superior corrosion resistance and high lubricant performance.

Features

Modified Bearing for QC Dry / Wet side Assembly for Brush Tank
  • Complete supplement structure bearing (Inside bearing spacer is not needed)
  • Compatible to bearing for both 200mm and 300mm
  • This part equips high performance such as low density, high robustness, low thermal expansion, high corrosion resistance, high breaking resistivity compared to OEM’s SST or ceramic bearing. (Reference of durability comparison: OEM (4 months) vs Si3N4 (19 months in continuous use)
  • Lid of both top and bottom of Si3N4 bearing is selectable either SST or PEEK.
  • Inside Si3N4 balls can maintain high precision surface and it leads to smoother lubricant performance. It also equips swift thermal dispersion characteristics.

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製品分類1 Consumables parts for sale/repair/overhauls/field services
製品分類2 CMP others
プロセス分類
サムネイル画像 Modified Bearing for QC Dry / Wet side
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