[CMP] Facility modification / Additional function for failure prevention UPA Relocation (Cable disconnection prevention) Trouble Detection Monitoring System Self Cleaning System Wafer Rotation Detection System for Mega/Brush Tank Electronics/MEMS Thin film deposition, Photolithography, Etching Services MEMS Total Solutions Roll-to-roll (R2R) process contract manufacturing business Microfluidics chip (µTAS) Nanoimprint Total Solution Precision Cleaning Services SUPERBLAST Consumables parts for sale/ refurbishment/ repair/ overhaul/ field services [CMP] Original parts [CMP] Repair / Maintenance / Overhaul [CMP] Facility modification / Additional function for failure prevention UPA Relocation (cable disconnect prevention) Trouble Detection Monitoring System Self-Cleaning System (automatic cleaning) Wafer Rotation Detection System for Mega / Brush Tank [Ion Implanter] Repair / Refurbishment / Overhaul [Sputtering / CVD / Etching / Photolithography] On-site engineering for academics & R&D Microfabrication Equipment (Systems) Sputtering targets and Bonding process
