Self-Cleaning System (automatic cleaning)

This is a system to clean widely spluttered slurry in CMP equipment by splashing DI water automatically.
It dramatically reduce micro-scratch issue caused by congealed slurry.

Features

  • We offer sale of spray unit set and/or installation services.
  • Very effective system for user who are annoyed by micro-scratch issue.
  • Possible to set-up sprays wherever users prefer to install.
Self-Cleaning System (automatic cleaning)

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製品分類1 Consumables parts for sale/repair/overhauls/field services
製品分類2 CMP others
プロセス分類
サムネイル画像 Self-Cleaning System (automatic cleaning)
説明文
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