[CMP] Repair / Maintenance / Overhaul Rotary Union repair Motor : Kollmorgen repair Motor : Head Sweep repair Motor (Pump) : Slurry Motor repair Motor : NSK Mega-torque & Driver repair Motor : Platen & Gear Box repair Gear/Base/Hub : Pad Conditioner repair HCLU Load Cup repair Laser : ISRM End Point repair Spindle rebuild QC Dry/Wet side repair QC Gear Box repair Roller Module repair Electronics/MEMS Thin film deposition, Photolithography, Etching Services MEMS Total Solutions Roll-to-roll (R2R) process contract manufacturing business Microfluidics chip (µTAS) Nanoimprint Total Solution Precision Cleaning Services SUPERBLAST Consumables parts for sale/ refurbishment/ repair/ overhaul/ field services [CMP] Original parts [CMP] Repair / Maintenance / Overhaul CMP Rotary Union repair / maintenance / overhaul Motor Kollmorgen repair / overhaul Motor Head Sweep repair CMP slurry motor (pump) overhaul / repair Motor : NSK Mega-torque & Driver repair Motor : Platen & Gear Box repair / overhaul Gear / Base / Hub Pad Conditioner repair / overhaul HCLU Load Cup repair / overhaul Laser : ISRM End Point repair Spindle rebuilds QC Dry / Wet side assembly QC Gear Box assembly Roller Module repair [CMP] Facility modification / Additional function for failure prevention [Ion Implanter] Repair / Refurbishment / Overhaul [Sputtering / CVD / Etching / Photolithography] On-site engineering for academics & R&D Microfabrication Equipment (Systems) Sputtering targets and Bonding process
