Gear / Base / Hub Pad Conditioner repair / overhaul

We refurbish Gear for conditioning head in reasonable cost.

Features

Pad Conditioner repair / overhaul
  • Refurbishment service including overhaul of rotation motor gear (RMG) and Harmonic Drive.
  • The most value for investment refurbish can be determined with adequate options for each failure symptom. (e.g. standard O/H, w/ RMG replacement, w/ HD replacement, w/ RMG + HD replacement)
  • Original bearing contributes to performance enhancement and reduction of lead-time.
  • Detailed report after final functional test and inspection is attached with repaired gear.
  • Motor replacement and repair of assembly with arm are also possible to be repaired depending on situation.

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製品分類1 Consumables parts for sale/repair/overhauls/field services
製品分類2 CMP others
プロセス分類
サムネイル画像 Gear/Base/Hub : Pad Conditioner repair
説明文
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