Rotary Union repair

CMP Rotary Union repair / maintenance / overhaul

We offer economical refurbish service of “Rotary union”, which is a mechanism to supply air to polishing head.

Features

Rotary Union
  • Available for 200mm and 300mm CMP system.
  • Available for both of 3 ports and 4 ports air supply system.
  • Refurbishment of other maker's products is possible.
  • Inspection for guarantee under the same condition as actual CMP process CMP.
  • We prepare dedicated returnable container.
  • Cost reduction up to 50% than brand-new one and more than 30% for repair.

検索用入力欄

記入時注意事項

  • テーブルの行列は変更しないでください。
  • 分類が複数ある場合は、| ←半角の縦棒で区切って連続で入力してください。
    また、区切り文字の前後に空白は入れないでください。
製品分類1 Consumables parts for sale/repair/overhauls/field services
製品分類2 CMP others
プロセス分類
サムネイル画像 Rotary Union repair
説明文
リダイレクトURL