Nanoimprint (NIL) Glossary

Si (silicone)
This is the best material, as it is easy to process and allows all kinds of measures. You can decide the width from mm.
Items Master/Mold
Materials Polymer
NIL available
This is a material, suitable for UV imprinted mold.The width can be decided as freely as the Si one. About the depth, it is a little bit worse than Si, but its transparency can be used for making microfluidic chips.
Items Mold/Imprinting
Materials Polymer
NIL available
Ni Electroforming Mold
Si and resist are developed from master. It's epistemic to hardness of Si and glass, as it's easy to recreate from original mold to copy mold.
Items Mold/Imprinting
Materials Polymer
NIL available
Possible size of structure is the same as Si and glass, if Ti and W are used as the material. Its most specific feature is that it can be imprinted on glass. KII has developed its own mold
Items Mold/Imprinting
Materials Polymer/Glass
NIL available
Diamond (under development)
Diamond is the best material for low-expansion, thermal resistance, thermal conductivity, hardness, tolerance to ablation, demolding, etc. Especially, it is suitable for nano-imprinting to glass.
Items Mold/Imprinting
Materials Glass
It has exceptional stability, when it comes to photolithography processing. Lens and other forms can be made 3D. The resist will be made a master and Ni electroforming will be brought, which will have NIL application possible.
Items Master
Materials Polymer


For trial imprinting , most suitable is resist, PMMA, polyca, polyamide, polyester, COC, COP, etc. For other supplied resins, we can offer original imprinting.
When we make this, we use interfered glass. For mold, the other often used material is quartz.



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製品分類1 Nanoimprinting
サムネイル画像 Nanoimprint Glossary