Uniform coating technique for fine patterns

ファインモスト Fine MoZt™ is our original technology which realizes uniform coating on ultrafine pattern.

Applicable to various applications such as anti-sticking treatment for NIL(nanoimprint), hydrophobic coat etc.

Example Anti-sticking treatment for nanoimprint

Fine MoZt™ technology optimize "coatability : realization of uniform coat along the patterned structure" which is one of the most important element in anti-sticking treatment.

Example of ideal state of coating

By conventional method, it is almost impossible to coat release agent in deep trench or groove especially when pattern size is sub-um level or aspect ratio is high.

Fine MoZt realizes anti-sticking treatment on 10 aspect ratio pattern.

Fine MoZt realizes anti-sticking treatment on 10 aspect ratio pattern.

Nanoimprint series of services

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製品分類1 Nanoimprinting
製品分類2 Imprinting
プロセス分類
サムネイル画像 Uniform coating technique for fine patterns : Fine MoZt
説明文
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