Microfabrication Equipment (Systems)

We offer superior Microfabrication Equipment(Systems) for R&D and volume production of products which requires nano/micro fabrication such as MEMS, Semiconductors, Sensors, Photovoltaics, Microfluidics, Nanoimprint.

Mask Aligner, UV Light Source, Exposure System

Mask aligner, UV light source , Exposure system and UV power meter calibration by OAI

  • MEMS
  • IC
  • PV
  • BIO
  • NIL
R&D Nano-meter-level exposure system PhableR 100

High resolution, non-contact proximity lithography system based on a proprietary technology of Eulitha

  • IC
  • NIL
All Plastic Versatile Spin Processor

POLOS™ manufactured by SPS a spin processor with all plastic design, brushless motor equipped and many options and expandability available

  • MEMS
  • IC
  • PV
  • BIO
  • NIL
Desktop Hotplate

A precision hotplate which is suitable for pre-bake and post-bake. Table top size. Customizable. Manufactured SPS.

  • MEMS
  • IC
  • PV
  • BIO
Wafer Holder

Fixing and protection of the wafer while processing. Min. edge exclusion. Manufactured by Silice

  • MEMS
  • IC
Desktop Electroplating System

A mobile electroplating unit which is space-saving and cost-saving. It has a Modular design and is custmizable. Manufactured by Silicet

  • MEMS
  • IC
PSS Production System

A system to develop and manufacture PSS (Patterned Sapphire Substrate) for LED production in reasonable cost based on our proprietary nanoimprint

  • NIL
Desktop nanoparticle generator

Desktop type nanoparticle generator designed with safety and environmental consideration. Drying technology of spark ablation can produce under control of nanoparticle size, purity and components.

  • IC
  • PV
  • BIO

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製品分類1 Microfabrication Tools
製品分類2
プロセス分類 Process & Equipment
サムネイル画像 Microfabrication Equipment
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