Microfabrication Equipment (Systems)

• Mask Aligner, UV Light Source, Exposure System

Mask aligner, UV light source , Exposure system and UV power meter calibration by OAI

• MEMS
• IC
• PV
• BIO
• NIL

• Nano-level photolithography system "PhableR"

High resolution, non-contact proximity lithography system based on a proprietary technology of Eulitha

• IC
• NIL

• All Plastic Versatile Spin Processor

POLOS™ manufactured by SPS a spin processor with all plastic design, brushless motor equipped and many options and expandability available

• MEMS
• IC
• PV
• BIO
• NIL

• Desktop Hotplate

A precision hotplate which is suitable for pre-bake and post-bake. Table top size. Customizable. Manufactured SPS.

• MEMS
• IC
• PV
• BIO

• Wafer Holder

Fixing and protection of the wafer while processing. Min. edge exclusion. Manufactured by Silice

• MEMS
• IC

• Desktop Electroplating System

A mobile electroplating unit which is space-saving and cost-saving. It has a Modular design and is custmizable. Manufactured by Silicet

• MEMS
• IC

• Nanoimprint Solution TEX Series

A system originally developed by Kyodo International that realizes projects from research and development to volume production at a reasonable cost compared to conventional photolithography.

• NIL