Precision Cleaning Service

We realized an extremely environment-friendly cleaning method.
We receive orders and take care of everything up to the shipping.

Precision Cleaning Service

Our distinctive features

  • From rough cleaning to precision cleaning
    We propose most suitable cleaning method based on extensive experience and confirm by sample test.
    By combination of our proprietary dry ice cleaning and conventional cleaning, we realize precision cleaning without damaging the object.
  • Consult us about various cleanings
    We evaluate your current cleaning from cost and environmental viewpoints
  • We support your future in-house cleaning
    We support development of automatic cleaning system for users who have plan of in-house cleaning in the future.

From receiving the parts for delivery up to shipping

Flow from receiving the parts for delivery up to shipping
  • Estimate
    Usage process (Ion Implant,sputter, CVD,etching,etc)
    Name of machine
    Way of blasting (gas)
    The more information we are given, the better estimate we can make If we do not have experience with the certain material, we start from test cleaning and prepare the most suitable cleaning recipe.
  • Delivery date : Around 1 week

No.1 : Cleaning parts with thin holes

Photo : Cleaning method, used for electrode having aluminium anodized coat

(Cleaning method,used for electrode having Aluminium anodized coat)
The 0.3mm pellet in the dry ice powder brings much better cleaning results!

Before Dry ice (CO2) blast cleaning

(Before cleaning)

After Dry ice (CO2) blast cleaning

(After cleaning)

No.2 : Initial cleaning

Initial Cleaning method

  • We clean the surface of the new parts and we reduce the particles, which appear during the beginning of the change of parts.
  • In the sub-micron generation, in order to achieve low number of particles, initial cleaning is demanded!
Image : Graph of Comparison for particle per wafer between conventioinal method and dry ice (CO2) cleaning

Al₂O₃ Bulk / Y₂O₃ Thermal spray

Cleaning method/Material Al₂O₃ Bulk Y₂O₃ Thermal spray
Not cleaned yet
The red circles are particles!
 Al2O3 Bulk : Not cleaned yet  Y2O3 Thermal spray : Not cleaned yet
After chemical cleaning
Reduction results, already visible
 写真:Al2O3バルク(ケミカル洗浄)  Y2O3 Thermal spray : After chemical cleaning
After Dry Ice Cleaning
Smooth surface!
No existence of particles!
 Al2O3 Bulk : after dry ice (CO2) cleaning  Y2O3 Thermal spray : after dry ice (CO2) cleaning

Oxalic acid alumite / Sulfuric acid alumite

Cleaning Method/Material Oxalic acid alumite Sulfuric acid alumite
Not cleaned yet Oxalic acid alumit : Not cleaned yet Sulfuric acid alumit : Not cleaned yet
After chemical cleaning Oxalic acid alumit : After chemical cleaning Sulfuric acid alumit : After chemical cleaning
After Dry Ice Cleaning Oxalic acid alumit : after dry ice (CO2) cleaning Sulfuric acid alumit : after dry ice (CO2) cleaning

 

Logo: Kawasaki Monodukuri Brand

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製品分類1 Precision Cleaning / Dryice blast
製品分類2 Cleaning service
プロセス分類
サムネイル画像 Precision Cleaning Service
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