- KYODO INTERNATIONAL INC./Japan
- Electronics MEMS
- MEMS Total Solution
- Support documentation of Silex Microsystems' MEMS foundry service
Support documentation of Silex Microsystems' MEMS foundry service
Foundry capability
Expertise in MEMS devices
* TSI implemented
- Accelerometers*
- Cantilevers
- Cell Analysis
- Drug Delivery
- Electrodes
- Filter structures
- Flow sensors*
- Gyros*
- CMOS Interposers*
- Lab-on-chips
- Microphones*
- Micro pump*
- Mirrors*
- Needles
- Optical Membranes
- Optical Benches*
- Pressure sensors*
- Print heads*
- RF switches
- Touch Membrane


