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Electronics Dpt.
TEL)
+81-044-852-7575
FAX)
+81-044-854-1979

METALS
1st device 2, 3, 6
device
4th device 5th device
Au -
Al
Ag - -
Bi - - -
C - -
Co - -
Cr
Cu
Fe - - -
Ge - - -
Hf - -
In - - -
Ir - - -
Mg - -
1st device 2, 3, 6
device
4th device 5th device
Mo - -
Nb - -
Ni
Pd - - -
Pt - -
Ru - - -
Si(N) - -
Si(P) - -
Sn - - -
Ta
Ti
V - - -
W -
Zn - - -
Zr -
OXIDES
1st device 2, 3, 6
device
4th device 5th device
Al2O3 -
CeO2 - - -
CuO - -
Fe2O3 - - -
HfO2 - -
In2O3 - - -
MgO - -
Mn2O3 - - -
Nb2O5 - - -
1st device 2, 3, 6
device
4th device 5th device
SiO - - -
SiO2 -
SnO2 - - -
TiO - - -
TiO2 -
Ta2O5 - -
ZnO - - -
ZrO2 - -
SILICIDES
1st device 2, 3, 6
device
4th device 5th device
CoSi2 - -
CrSi2 - - -
MoSi2.5 - -
NiSi2 - - -
TaSi2 - - -
1st device 2, 3, 6
device
4th device 5th device
TiSi2 - -
WSi0.4 - - -
WSi2 - -
WSi2.5 - - -
ZrSi2 - - -
NITRIDES
1st device 2, 3, 6
device
4th device 5th device
AIN - -
BN - - -
Cr2N - - -
1st device 2, 3, 6
device
4th device 5th device
Si3N4 -
TIN - -
ZrN - -
CARBIDES
1st device 2, 3, 6
device
4th device 5th device
SiC -
TiC - -
WC - - -
ALLOYS
1st device 2, 3, 6
device
4th device 5th device
Al-Cu 96:4wt%
- - -
Al-Cu 99.5:0.5wt%
-
Al-Sc 99.9:0.1wt%
- - -
Al-Si 99:1wt%
- -
Al-Si-Cu 98.5:1:0.5wt%
-
Al-Ti 99.5:0.5wt%
- - -
Cu-Cr 92:8wt%
- - -
Cu-Cr 94:6wt%
- - -
Cu-Cr 96:4wt%
- - -
Cu-Ni 92:8wt%
- - - -
Cu-Ni 94:6wt%
- - -
Cu-Ni 96:4wt%
- - -
Co-Cr 85:15wt%
- - -
Ni-Cr 80:20wt%
- - -
Ni-Cr-Si 40:40:20wt%
- - -
Ni-Cr-Si 45:45:10wt%
- - -
Ni-Cr-Si 48:48:4wt%
- - - -
OTHERS
1st device 2, 3, 6
device
4th device 5th device
Coning 7059 - - -
Coning 7570 - - -
Sialon - -
Sendust - - -
Teflon - - -
Pyrex - -
BaTiO3 - -
BK 7 - - -
CrSiO 40:60wt%
- - -
ITO -
IZO - -
AZO - - -
LiNbO3 - - -
PZT - -
SrTiO3 - -
TaSiO2 20:80at%
- - -
TaSiO2 40:60at%
- - -
TaSiO2 45:55at%
- - -
Ta-SiO2-Ni 65.7:32.7:1.6wt%
- - -

1st device 3" target It is possible to make thin films with provided from customer targets
2nd device 4" target We sell targets as well.
4th device 8"target

Specifications of our sputtering system
Target Stock List
Analysis and assay service
CVD Performance
List
Insulating film characteristics data
Transmittance of
sputtered ITO film Data
Backside electrode deposition for Power device
Inquiry

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