CFS-4ES Sputtering method Side sputtering Reverse sputtering Possible Substrate holder 200mm Reactive sputtering Posssible Uniformity 10% Power supply RF MAX 500W Sputtering source Magnetron 3sputtering sources Ventilation system Oil diffusion pump Oil rotation pump Substrate heating MAX300

SRV-4300 Sputtering method Upward sputtering Reverse sputtering Possible Substrate holder 320mm Reactive sputtering Possible Uniformity 10% Power supply RF MAX 500W DC　MAXcan be used Sputtering source Magnetron 3sputtering sources Buyer sputter Possible Substrate heating MAX300 Ventilation system Oil diffusion pump Oil rotation pump

SRV-4310 Sputtering method Upward sputtering Reverse sputtering Possible Substrate holder 320mm Reactive sputtering Possible Uniformity 10% Power supply RF MAX 500W DC MAX can be used Sputtering source Magnetron 3sputtering sources Ventilation system Cryopump Oil rotation pump Substrate heating MAX300

CFS-12P-100 Sputtering method Upward sputtering Reverse sputtering Possible Substrate holder 396X4 stage Reactive sputtering Possible Uniformity 10% Power supply RF MAX 4KW DC MAX can be used Sputtering source Magnetron 3sputtering sources Ventilation system Cryopump Mechanical booster pump Oil rotation pump Substrate heating MAX180

SDH10311 Sputtering method Side sputtering Reverse sputtering Possible Substrate holder 410X4 stage Reactive sputtering Possible Uniformity 10% Power supply DC MAX 5KW Sputtering source Magnetron 3sputtering sources Ventilation system Cryopump Mechanical booster pump Oil rotation pump

SRV-4320 Sputtering method Upward sputtering Reverse sputtering Possible Substrate holder 320mm Reactive sputtering Possible Uniformity 10% Power supply RF MAX 500W DC MAX can be used Sputtering source Magnetron 3sputtering sources Buyer sputtering Possible Substrate heating MAX300 Ventilation system TMP

Specifications of our sputtering system	Target Stock List	Analysis and assay service	CVD Performance List
Insulating film characteristics data	Transmittance of sputtered ITO film Data	Backside electrode deposition for Power device	Inquiry