Consumable parts for semiconductor manufacturing equipment and Cleaning Service

Semiconductor manufacturing equipment for CMP; Ion Implant; Sputtering;
CVD; Etching of Consumable parts and long lived to Remodeling, E-chuck,
Retainer rings and VAT gate valve refurbishment, etc, services reduces the running cost.

CMP

Consumable parts

• Consumable Parts

Parts refurbishing service

• Retainer Ring Refurbishment
• NSK Megatorque motor refurbish
• Rotary union refurbish/repair
• Platen motor/Gear box refurbish/repair
• End point laser refurbish/repair

Modified parts

• Long Life Retainer Ring
• BCR:Bonded Composite Ring
• Low Maintenance Head Retainer Ring
• Flexure
• Bearing updrade
• Dual channel Proportional
• Pad conditioner upgrade
• Change of slip ring for digital end point
• VME Processor board upgrade
• Wet robot monitor/Encoder Upgrade

Semiconductor
manufacturing system parts

• Semiconductor manufacturing system parts TOP
• Repair & Maintenance Total Solution

CMP Consumable Parts

• Consumable Parts

CMP Parts Refurbishing

• Retaining Ring
• NSK Megatorque motor
• Rotary union
• Platen motor/Gear box
• End point laser

CMP Engineered Parts

• Long Life Retaining Ring
• BCR:Bonded Composite Ring
• Low Maintenance Head Retaining Ring
• Flexure
• Bearing updrade
• Dual channel board upgrade
• Pad conditioner upgrade
• Slip ring for digital end point exchange
• VME Processor board upgrade
• Wet robot motor/Encoder Upgrade

Ion Implanter Parts Refurbishing Service

• Heat Sink
• Direct Drive (DD) motor
• Power supply, board
• Bushing

Other Consumable Parts

• Sputtering
• CVD
• Etching
• Ion Milling

Other Parts Refurbishing

• Etcher and CVD anodize/spray
• RPS
• Vacuum valve(VAT gate valve)
• Stepping motor
• Heater bellows
• Robot repair
• Power supply (DC/RF) repair, Pump Overhaul etc.

ISAE160

KYODO INTERNATIONAL INC.

2-10-9 Miyazaki,
Miyamae-ku, Kawasaki-shi,
Kanagawa-ken, 216-0033,
Japan

TEL)+81-044-852-7575 (Did)
FAX)+81-044-854-1979