- KYODO INTERNATIONAL INC./Japan
- Electronics MEMS
- MEMS Total Solution
- MEMS Development Tools
- Wafer / Substrate Holder for MEMS Processing
Wafer / Substrate Holder for MEMS Processing
| Chemical Etching | BASIC Ⅱ Wafer holder for Chemical etching |
|---|---|
| PLUS Ⅱ Wafer holder for Chemical etching | |
| Electrolytic Etching | PLUS EⅡ Wafer holder for Electrolytic Etching |
| Electrolytic Plating | PLUSⅡG Wafer holder for Electrolytic Plating |
| Accessory | Silicet Vacuum Box accessory for wafer holder |
For Chemical Etching
BASIC Ⅱ Wafer Holder for Chemical Etching
By completely fixing the wafer by vacuum absorption, there is no leakage at the backside of it.
| Sealing | EPDM or Viton |
|---|---|
| Hose | Norprene or Viton |
| Main unit | PTFE |
PLUS Ⅱ Wafer Holder for Chemical Etching
Completely protects wafer outer circumference by double sealing. By completely fixing the wafer by vacuum absorption, there is no leakage at the backside of the wafer
| Sealing | EPDM or Viton |
|---|---|
| Hose | Norprene or Viton |
| Main unit | PTFE |
| Cover | Glass or PMMA |
Electrolytic Etching
PLUS EⅡ Wafer Holder for Electrolytic Etching
Electrodes are implanted in the plate within the protection area (quantity and position of electrodes are customizable). By completely fixing the wafer by vacuum absorption, there is no leakage at the backside of it.
The electrode (Pt-Ir) is optionally available.(pic)
| Sealing | EPDM or Viton |
|---|---|
| Hose | Norprene or Viton |
| Main Unit | PTFE |
| Cover | Glass or PMMA |
For Electrolytic Plating
PLUSⅡG Wafer Holder for Electrolytic Plating
Electrodes are implanted in the plate within the protection area (quantity and position of the electrodes are customizable). By completely fixing the wafer by vacuum absorption, there is no leakage at the backside of it.
The electrode (Pt-Ir) is optionally available (pic).
| Sealing | EPDM or Viton |
|---|---|
| Hose | Norprene or Viton |
| Main unit | PTFE or PMMA |
| Cover | Glass or PMMA |
Accesory
Silicet Vacuum Box Accessory for Wafer Holder
With Leak detection, Self control functions being resided, the tool constantly supports substrate with proper vacuum pressure.
Ease to use!
Operation in safe manner !
The tool discharges safely the liquid, if substrate breakage leads to a liquid leakage in the pump.
MEMS Total Solution
MEMS Prototyping
MEMS Volume Production
Microfluidic Chip
MEMS Development Tools
TEL)+81-044-852-7575 (Did)
FAX)+81-044-854-1979
KYODO INTERNATIONAL INC.
2-10-9 Miyazaki,
Miyamae-ku, Kawasaki-shi,
Kanagawa-ken, 216-0033,
Japan
FAX)+81-044-854-1979
2-10-9 Miyazaki,
Miyamae-ku, Kawasaki-shi,
Kanagawa-ken, 216-0033,
Japan
