Fine MoZt TM - Uniform coating technology for ultrafine pattern | Electronics, KYODO INTERNATIONAL INC. /Japan

Electronics Dpt.
TEL)
+81-044-852-7575
FAX)
+81-044-854-1979

タイトル「Fine MoZt（ファインモスト）：微細パターンへ均一にコーティングする独自技術-NIL（ナノインプリント）用離型処理、撥水コートなど」

	Fine MoZt^TM is our original technology which realizes uniform coating on ultrafine pattern.
Applicable to various applications such as anti-sticking treatment for NIL(nanoimprint), hydrophobic coat etc.

Fine MoZt^TM technology optimize "coatability : realization of uniform coat along the patterned structure" which is one of the most important element in anti-sticking treatment.

By conventional method, it is almost impossible to coat release agent in deep trench or groove especially when pattern size is sub-um level or aspect ratio is high.

realizes anti-sticking treatment on 10 aspect ratio pattern.

Nanoimprint series
of services

Nanoimprinting

Trial Mold